Micro/Nano Transducer Technology and Sensors
Micro-nano sensors and Microsystems are the main research fields of the laboratory based on microelectronics technology and micro-nano fabrication technology. To meet the increasing requirements of sensing technology for national defence, aerospace, industrial and medical uses, the laboratory concentrates on the core sensing technology and high-performance sensors with new principles, new materials, new methods and new technologies, the key technologies on processing, packaging and system integration, and it also powerfully develops the integrated, intelligent, network based on sensing microsystem.
In order to catch up with the new generation of MEMS mainstream （APS） technology invented by BOSCH, the laboratory has achieved the breakthrough in the mainstream sensor scale manufacturing technology with one single-face silicon chip in china. In recent years, it has developed initiative “MIS” manufacturing technology for innovative international competitive MEMS sensors, and achieved a series of product applications. Great achievements and applications have been reaped in the research on early detection of lung cancer. The level of basic research has been remarkably improved on sensitive new effects, new methods and new materials. A number of high-level papers and invited talks have been appeared in some well-known academic journals and conferences such as Nature Comm. ,Nano Lett. ,J Am. Chem. Soc. ,Angew. Chem. Int. Ed. , Anal. Chem.、Biosens. Bioelectron. ,Small, Lab On a chip etc. In the development of explosive detection, it has realized the integration of micro organic semiconductor fluorescent sensor, and developed trace explosives detectors(the weight of 0.6-1.2kg, the power of 2W, the detection limit of 1Pg) used for the series of products. They have played an important role in core department guard at the G20 summit in Hangzhou, "the victory of the anti- fascist war 70th anniversary parade" and other major activities of the security work.