MEMS is the mainstream technology of Micro and nano sensor manufacturing today, and the largest International top academic Conference in this field IEEE MEMS (IEEE International Conference on Micro Electro Mechanical Systems), It is held annually in the Americas, Europe and Asia, and has been held 36 times so far. The conference is the highest level of the international academic conference in the field of micro-electro-mechanical systems, mainly reporting the new research progress in micro and nano machining and integration, micro and nano sensors and actuators, and Microsystems.

The 37th IEEE MEMS International Conference will be held in Austin, USA at the end of January 2024. The conference passed the review of the international committee, and a total of 316 papers were accepted in more than 900 submissions, including 72 Oral papers and 244 Poster papers. Shanghai Institute of Microsystem and Information Technology, CAS selected 26 papers this time, ranking first in the world. Among them, there were 7 Oral papers, accounting for about 10% of the total Oral papers of this conference. Oral papers included MEMS gyroscopes, MEMS biomedical sensors, MEMS optical devices and MEMS thermal sensing drives, etc.