Fang Chen, Ph.D., Associate Professor of Shanghai Institute of Microsystem and Information Technology (SIMIT). He earned his B.S., M.S., Ph.D. degrees in mechanical and electronic engineering from Northwestern Polytechnical University (NPU), Xi’an, China. He was once a joint-training Ph.D. student with the Nano Group (Prof. M. Kraft), School of Electronics and Computer Science, University of Southampton. He also won a postdoctoral fellowship position with title of assistant specialist in University of California Irvine (Prof. Andrei Shkel). Since 2017, he was appointed associate professor of SIMIT. His researches focus on MEMS sensors, including MEMS vibratory gyroscopes, accelerometers, Lorentz force magnetometers and closed-loop interface circuit. He has published more than 20 peer-reviewed papers in IEEE J.MEMS, IEEE Sensors J., JMM, IEEE MEMS conference, Transducers conference, IEEE Sensors conference et al., and obtained 6 authorized China invention patents. He was won first prize of Shaanxi province science and technology award and first prize of china graduate electronics design contest.
(1) First prize of Shaanxi province science and technology award (2017)
(2) First prize of china graduate electronics design contest. (2017)
(3) Outstanding graduates of Northwestern Polytechnical University. (2014)
(4) National scholar ship for doctoral students (2012 & 2013)
MaJOR PROJECTS
(1) National Natural Science Foundation of China, “Research on Silicon Micro-Hemispherical Gyroscope Self-Calibrating Sigma-Delta Interface and Its Single-chip Integrated Technology”, 2020.1-2023.12
(2) National Natural Science Foundation of China, “High precision silicon-based single-chip integrated six-axis micromechanical E-compass sensor research”, 2016.1-2018.12
(3) Natural Science Foundation of Shanghai, “High precision electrostatic force rebalanced TMR accelerometers research”, 2019.7-2022.6
(4) Key point project of Aviation Industry Corporation of China, “*****MEMS gyroscope”, 2018-2020
(5) Project of NORINCO GROUP, “**Sigma-delta gyroscope”, 2015-2017
RESEARCH EXPERIENCE
2017-NOW, Shanghai Institute of Microsystem and information Technology, associated professor, graduate supervisor.
2014.9-2017, Shanghai Institute of Microsystem and information Technology, assistant researcher.
EDUCATION
2009.9-2014.8, Northwestern Polytechnical University, Mechanical and Electronic Engineering, Ph.D. degree
2010.10-2014.8, University of Southampton, Nano group, Joint-training Ph.D. student
2006.9-2009.4, Northwestern Polytechnical University, Mechanical and Electronic Engineering, M.S. degree
2002.9-2006.7, Northwestern Polytechnical University, Mechanical and Electronic Engineering, B.S. degree
INVITED TALKS
(1)Chen F., Gu J., Salimi P., Kraft M., Li X., Self-clocking electro mechanical sigma delta modulator quadrature error cancellation for MEMS gyroscope, 32st IEEE International Conference on Micro Electro Mech. Syst. (MEMS), MEMS 2019, Soul, Korea, 2019.1.27-1.31
(2)Chen F., Zhou W., Zou H., Kraft M., Li X., Self-clocked dual-resonator micromachined Lorentz force magnetometer based on electromechanical sigma-delta modulation, 31st IEEE International Conference on Micro Electro Mech. Syst. (MEMS), MEMS 2018, Belfast, UK, 2018.1.21-1.25
(3)Sheng B., Chen F., Qian C., Xu D., Guo S., Li X., A dual quantization electromechanical sigma-delta modulator vibratory wheel gyroscope, 15th IEEE International Conference on Sensors, Sensors 2016, Orlando, USA, 2016.10.30-2016.11.2
SELECTED PUBLICATIONS
(1) Fang Chen, Wei Zhou, Hongshuo Zou, Michael Kraft, Xinxin Li, Dual resonator MEMS magnetometer based on self-clocking sigma-delta modulation, IEEE Sensors Journal, 2020, 20(3): 1527-1535
(2) Bin Sheng, Fang Chen (Co-first Author), Chao Qian, Dacheng Xu, Shuwen Guo, Xinxin Li, Design of a dual quantization electromechanical sigma-delta modulator MEMS vibratory wheel gyroscope, IEEE Journal of Micro Electro Mechanical Systems, 2018, (99): 1-13
(3) Fang Chen, Yi Zhao, Jiachou Wang, Hongshuo Zou, Michael Kraft, Xinxin Li, A Single-side Fabricated Tri-axis (111)-Silicon Micro-Accelerometer with Electromechanical Sigma-delta Modulation, IEEE Sensors Journal, 2018, 18(5): 1859-1869
(4) Fang Chen, Xinxin Li, Michael Kraft, Electromechanical Sigma-delta Modulators Force feedback interface for capacitive MEMS Inertial Sensors: A Review, IEEE Sensors Journal, 2016, 16(17) : 6476-6495
(5) Fang Chen, Weizheng Yuan, Honglong Chang, Guangmin Yuan, Jianbing Xie, Michael Kraft, Design and Implementation of an Optimized Double Closed-loop Control System for MEMS Vibratory Gyroscope, IEEE Sensors Journal, 2014, 14(1) : 184-196
(6) Fang Chen, Weizheng Yuan, Honglong Chang, Reuben Wilcock, Michael Kraft, Parameter Optimization for a High-order Band-pass Continuous-time Sigma-delta Modulator MEMS Gyroscope Using a Genetic Algorithm Approach, Journal of Micromechanics and Microengineering, 2012, vol.22 (105006).
