About Us Research Scientists International Cooperation News Education Papers Resources Societies & Publications Join Us Links
Research Divisions
State Key Laboratory of Transducer Technology
State Key Laboratory of Functional Materials for Informatics
Key Laboratory of Terahertz Technology, CAS
Wireless Sensor Networks Laboratory
Internet of Things System Technology Laboratory
Laboratory of Broadband Wireless Technology
New Energy Technology Center
Division of Superconductivity
Location: Home > Research > Research Divisions  > State Key Laboratory of Transducer Technology

The State Key Laboratory of Transducer Technology, which was established upon the approval of the then National Planning Commission in 1987 and passed the check and acceptance in 1989, is the first national laboratory working on sensing technology in China. Currently Professor Xinxin Li is the director, and Prof. Yirong Wu, an academician, is the director of its academic committee.

The laboratory includes two branches: south branch located in Shanghai Institute of Microsystem and Information Technology (SIMIT), and north branch located in Institute of Electronics (IECAS), as well as four research sites located in Shanghai Institute of Technical Physics (SITP), Hefei Institute of Intelligent Machines (IIM), Institute of Semiconductors and Institute of Microbiology (IMCAS), which focus on optical sensors, thick-film sensors, gas sensors, bio-sensors respectively. Besides, it has the management office in SIMIT. In the years of 1993, 1997, 2002, 2007 and 2012, the laboratory successfully passed the assessments organized by the competent national authorities for four times.

 

The main research fields of the laboratory are micro-nano sensors and microsystems based on microelectronics technology and micro-nano fabrication technology. To cater for the increasing requirements on sensing technology for national defence, aerospace, industrial and medical uses, the laboratory concentrates on the core sensing technology and high-performance sensors with new principles, new materials, new methods and new technologies, the key technologies on processing, packaging and system integration, and it also develops the integrated, intelligent, network-based sensor system. Its major research directions include:

Principle, design and manufacture of Sensor

Physical sensors such as inertial sensors of accelerator and gyroscope, electric field sensors, pressure sensors, optical sensors for aerospace; chemical sensors, bio sensors, gas sensors.

MEMS sensors and micro-nano manufacturing technology

Nanomachining technologies, Integrated nano-sensors and Nanoelectromechanical Systems(NEMS)

Micro Sensing System

    Biochemical detector; SPR biochemical analyzer; System On Chip (SOC)

Integrated Sensing System

    Application Specific Integrated Circuit (ASIC) for Sensors; signal detection and processing circuit for micro-sensors; System in Package (SiP)

Intelligent sensor

Sensor network node 

In the last two decades since its establishment, the laboratory has undertaken dozens of major projects under Climbing-B, "973" and other national research programs. Great achievements and progress have been reaped in the research on manufacturing technology and devices of micro-nano electrical mechanical systems (MEMS/NEMS) like micro-static motors, micro oscillator, piezoresistive micro-gyroscope, high-shock acceleration sensor, high-precision resonant pressure sensor, vacuum microelectronic pressure sensor and thermopile array, etc. What's more, all infrared sensors and focal plane components provided by this laboratory have found wide applications in Chinese meteorological satellites, oceanic satellites and Shenzhou spacecraft payload, which send back high-quality images. In recent years, it has developed micro-nano cantilever sensors, System On Chip (SOC) and self-assembled micro-sensors. The laboratory has assumed 3 projects under "973" Program , 1 project under the National Science Fund for Distinguished Young Scholars and 4 key projects under the National Natural Science Fund, as well as many projects under "863" Program.

 

Furthermore, the laboratory enjoys high international reputation for its advanced micro-nano fabrication and developed novel sensors such as MEMS sensors, micro-nano manufacturing and self-assembly techniques, biochemical detection and analysis systems, and so on. A number of high-level papers and invited talks by have been appeared in some well-known academic journals and conferences such as Lab On a chipIEEE J-MEMSIEEE TIEJMM, Sensors and Actuators, IEDM, IEEE MEMS, Transducers etc. Meanwhile, the laboratory is an active player in academic activities, with experts from it serving in several important academic organizations. 

There are nearly 60 employees in this laboratory, and 30 of them are professors, including academicians, chief scientists of the projects under "973" Program, experts for "863" Program, the National Science Fund for Distinguished Young Scholars and "One Hundred Talents Program" of CAS. 

The laboratory boasts the state-of-the-art facilities and equipment, which are open to all investigators. Through kinds of joint projects or research tasks, it has established cooperation with lots of domestic researchers. The laboratory has given full support to all researchers in sensing technology field in China.

 

The laboratory has played a leading role in the field of fundamental application research on sensing technology in China, and will continue to center its work around the requirements of the national economic and social development with priority given to sensing technology, and strive to become a world-famous research-and-development platform in micro-nano sensor and microsystems in China.                          

Address865 Changning Road, Shanghai, China

Zip code200050

Support Unit: Shanghai Institute of Microsystem and Information Technology,CAS

Tel: 86-21-62511070 ext. 5463

Fax86-21-62131744

E-mailzhulin@mail.sim.ac.cn

Websitehttp://www.sim.ac.cn

Contact Ms. Lin Zhu

Copyright © 2002-2009 Shanghai Institute of Microsystem And Information Technology
865 Chang Ning Road Shanghai