Professor Weili Liu received her PhD in Microelectronics from Shanghai Institute of Microsystem and Information Technology, CAS in 2002, and then she has worked in this institute until now. Her research interests include nano materials, semiconductor materials and devices, chemical mechanical polishing, etc. She has rich experience in silica-based semiconductor materials, new fabrication technology and surface modified technology of nano materials. Prof. Liu has successfully developed high purity colloidal silica and slurry for CMP, which have been widely applied in the fields of IC, LED and mobile phone. She has published more than 100 SCI papers, and applied for 50 patents. She has also given many invited presentations at international conferences. Currently Prof. Liu is a member of the international program committee of ICPT, executive council member of micro-nano manufacturing tribology committee, and deputy secretary-general of the micro-nano processing working group of the national nanotechnology standardization committee.
Assistant Professor, Associate Professor and Professor, Shanghai Institute of Microsystem and Information Technology, CAS, 2002-present
Research Associate, The Hong Kong Polytechnic University, 2004.3-2004.7
Research Assistant, City University of Hong Kong, 2001.7-2002.7
2016, Technological Invention of Shanghai First Prize
2014, Award of Excellent Academic Leaders of Shanghai.
2007, Outstanding Science and Technology Achievement Prize of the Chinese Academy of Sciences
2007, National Science and Technology Progress First Prize
2005, Science and Technology Progress of Shanghai First Prize
National Major Scientific and Technological Special (2011ZX02704-002 and 2009ZX02030-001)
National High Technology Research and Development Program (2006AA03Z315)
National Natural Science Foundation of China (60201004, 60776002 and 60576014)
Projects from Science and Technology Commission of Shanghai (14XD1425300, 07QH14017, 04QMX1463, 08111100300 and 11nm0500300)
1. Yonghui Zheng, Mengjiao Xia, Yan Cheng, Feng Rao, Keyuan Ding, Weili Liu, Yu Jia, Zhitang Song, and Songlin Feng, Direct observation of metastable face-centered cubic Sb2Te3 crystal, Nano Research 2016, 9(11): 3453–3462
2. Chenliang Liang, Weili Liu, Yonghui Zheng, Xinglong Ji, Shasha Li, Weijun Yin, Xiaohui Guo, Zhitang Song, Fractal nature of non-spherical silica particles via facile synthesis for the abrasive particles in chemical mechanical polishing, Colloids and Surfaces A: Physico chem. Eng. Aspects 500 (2016) 146–153
3. Shasha Li, Weili Liu, Weixia Yan, Chenliang Liang and Zhitang Song, Material Removal Mechanism of Ti0.4Sb2Te3 Film during Chemical Mechanical Polishing in Acidic Permanganate-Based Slurry, ECS Journal of Solid State Science and Technology, 5 (2) P47-P50 (2016)
4. Weixia Yan, Liangyong Wang, Weili Liu, Zhitang Song，Role of the Lysine as a Complexing Agent in Ge2Sb2Te5 Chemical Mechanical Polishing Slurries，Electrochimica Acta，135 (2014) 101–107
B.S., Materials Science and Technology, 1996, Zhejiang University
M.S., Materials Science and Technology, 1996, Zhejiang University
PhD., Microelectronics, 2002, Shanghai Institute of Microsystem and Information Technology, CAS
