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Research Divisions
State Key Laboratory of Transducer Technology / Key Laboratory of Microsystem Technology
Strate Key Laboratory of Functional Materials for Informatics
Nano Technology Laboratory
Key Laboratory of Wireless Sensor Networks & Communications, CAS
RF and Energy Microsysterm Technology Laboratory
Location: Home > Research > Research Divisions  > State Key Laboratory of Transducer Technology / Key Laboratory of Microsystem Technology

The Laboratory was founded in 1987 with its research effort and focus on micro/nano sensors,microeletromechanical systems (MEMS),by means of microelectronic and micromachining fabrication technologies.The Lab also explores
integrated microsystems and advanced packaging techniques.

Major research areas:
■ Micro/nano scale effects and their characterization and mechanism
■ Micro and nano compatible fabrication technologies
■ MEMS wafer fab and packaging
■ Monolithic integration and 3-D integration of microsystems
■ Microsensors and nanosensors
■ Integrated microsystem technologies

Copyright © 2002-2009 Shanghai Institute of Microsystem And Information Technology
865 Chang Ning Road Shanghai