The Laboratory was founded in 1987 with its research effort and focus on micro/nano sensors,microeletromechanical systems (MEMS),by means of microelectronic and micromachining fabrication technologies.The Lab also explores integrated microsystems and advanced packaging techniques.
Major research areas: ■ Micro/nano scale effects and their characterization and mechanism ■ Micro and nano compatible fabrication technologies ■ MEMS wafer fab and packaging ■ Monolithic integration and 3-D integration of microsystems ■ Microsensors and nanosensors ■ Integrated microsystem technologies |